Effect of non-uniform electron energy distribution function on plasma production in large arc driven negative ion source.

Abstract

Spatially non-uniform electron energy distribution function (EEDF) in an arc driven negative ion source (JAEA 10A negative ion source: 10 A NIS) is calculated numerically by a three-dimensional Monte Carlo kinetic model for electrons to understand spatial distribution of plasma production (such as atomic and ionic hydrogen (H(0)∕H(+)) production) in source chamber. The local EEDFs were directly calculated from electron orbits including electromagnetic effects and elastic∕inelastic collision forces. From the EEDF, spatial distributions of H(0)∕H(+) production rate were obtained. The results suggest that spatial non-uniformity of H(0)∕H(+) productions is enhanced by high energy component of EEDF.

• Authors: T Shibata, S Koga, R Terasaki, T Inoue, M Dairaku, M Kashiwagi, M Taniguchi, H Tobari, K Tsuchida, N Umeda, K Watanabe, A Hatayama
• Journal: The Review of scientific instruments (Rev Sci Instrum) Vol. 83 Issue 2 Pg. 02A719 (Feb 2012) ISSN: 1089-7623 [Electronic] United States
• PMID: 22380228 (Publication Type: Journal Article)