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poly(4- hydroxystyrene- co- 2- ethyl- 2- adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
an EUV resist; structure in first source
Also Known As:
poly(HOST-co-EAMA-co-PAG)
Networked:
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relevant articles (
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outcomes,
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trials/studies)
Bio-Agent Context: Research Results
Organic Chemicals: 133
Carboxylic Acids: 973
Acyclic Acids
Acrylates: 212
Polymethacrylic Acids
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
Sulfur Compounds: 278
Sulfonium Compounds: 1
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
Onium Compounds
Sulfonium Compounds: 1
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
Macromolecular Substances: 97
Polymers: 13051
Plastics: 13104
Synthetic Resins: 101
Acrylic Resins: 282
Polymethacrylic Acids
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
Biomedical and Dental Materials
Polymers: 13051
Plastics: 13104
Synthetic Resins: 101
Acrylic Resins: 282
Polymethacrylic Acids
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)
Technology, Industry, and Agriculture
Manufactured Materials
Biomedical and Dental Materials
Polymers: 13051
Plastics: 13104
Synthetic Resins: 101
Acrylic Resins: 282
Polymethacrylic Acids
poly(4-hydroxystyrene-co-2-ethyl-2-adamantyl methacrylate-co-phenyl methacrylate dimethylsulfonium nonaflate)