chlorine trifluoride

structure

Networked: 1 relevant articles (0 outcomes, 0 trials/studies)

1.	Tsai, Wen-Tien: 1 article (06/2011)

1.	Chemical Burns (Chemical Burn) 06/15/2011 - "The first accident involving chlorine trifluoride (ClF(3)) in the history of semiconductor fabrication processes occurred on 28 July 2006 at Hsinchu (Taiwan), resulting in a large release of the highly reactive material and causing the chemical burn to several workers. "

1.	Semiconductors